Green Line for Annealing
LIMO's optical system Green Line is optimally suitable for annealing processes. Thanks to LIMO's patent technology an ultra-narrow line (8 µm) with highest homogeneity has been achieved.
Further advantages are:
- Small system footprint
- Low initial and operation costs
- Much lower maintenance costs compared to ELA-process
- Higher system availability of > 95% (ELA-process 75%)
With LIMO's Green Line following materials can be processed:
- C-Si
- A-Si on glass
- TCO (ITO) on glass
- Semiconductor wafer (Si, GaAs)
LIMO's Green Line can be used for example for the following industries:
- Flat panel display production
- Semiconductor devices
- Thin film solar cells production
65 mm Green Line
Do you need further information? Are you interested in an individual offer that focuses on your solution? Send us your completed contact form or give us a call!